China Starts Small-Batch Domestic Immersion DUV Production, Targeting 5 Units This Year

Shanghai SOE initiates limited immersion DUV output with 5 units planned for 2024, rising to 20 by 2027. Deliveries to major foundries face verification hurdles and performance gaps vs ASML.

Woofun AI reports that an unnamed Shanghai state-owned enterprise has commenced small-batch production of domestically manufactured immersion DUV lithography machines. The company intends to deliver approximately five units this year, scaling output to roughly twenty units by 2027. Initial shipments are targeted at major foundries including SMIC, Hua Hong Semiconductor, and ChangXin Technology, though the equipment must undergo months of verification for accuracy, stability, and compatibility.

While most components are sourced domestically, key parts remain dependent on Japan, and performance lags behind ASML, which plans to deliver 131 immersion DUV units by 2025. This domestic production milestone emerges as the U.S. considers tightening export restrictions on lithography equipment and maintenance services to China.